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Computational modeling in semiconductor processing
Meyyappan, M. -ed.
Additional author
Not available
Publisher
Artech House
Year of publication
1995
Publication place
Boston
Language
(eng) English
ISBN
0890067074
Series
The Artech House materials science library
Edition
Not available
Subject
SEMICONDUCTORS-DESIGN AND CONSTRUCTION-DATA PROCESSING
Note
Not available
Abstract
Index: p. 355-363
Number of pages
x, 363 p.
Dimension
24 cm
Other description
ill.
Summary / review / table of contents
Not available
Copies
Access no.
Call number
Location
Status
04121/96
621.381520113 Mey C
Not available
Available
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